Physics of Radiofrequency Capacitive Discharge

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Management number 233621604 Release Date 2026/06/27 List Price $38.56 Model Number 233621604
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This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties. Read more

ASIN B07D926FB8
XRay Not Enabled
Format Print Replica
ISBN13 978-0429894237
Edition 1st
Language English
File size 11.2 MB
Page Flip Not Enabled
Publisher CRC Press
Word Wise Not Enabled
Print length 342 pages
Accessibility Learn more
Publication date May 23, 2018
Enhanced typesetting Not Enabled

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